Not so sure about the monopoly problem vis a vis TSMC.
It’s not quite the same issue with fab process tech, because their customers are not consumers spending a few hundred dollars at a time, but rather OEMs spending tens of $millions to $billions at a time on fab allocation.
If TSMC stops innovating, their customers no longer have the forward momentum of improvement to justify consumers buying their new generations of product, and the whole thing falls apart.
IMHO I’m kinda more concerned about litho machines at this point.
That seems like more of a choke point than the fabs that use them.